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Entegris Valves

High-purity, PFA corrosion-resistant valves provide maximum fluid control of corrosive chemicals, DI water, solvents and slurries

The most complete line of fully characterized, reliable, high-purity Entegris valves that meet your temperature, pressure, flow, size, configuration and installation specifications. Sizes from 1/4" to 2" with flow Cv up to 60.

  • Integra® Valves
    High-purity, corrosion-resistant Integra® valves offer reliable performance in high-purity, aggressive chemical applications. With no external metal parts, the valves are safe and will not corrode in harsh environments. The high-temperature version is rated to 180°C fluid.

  • CR and CH Series Valves
    High-purity CR and CH Series valves are ideal for handling wet etch and clean process chemicals. The compact valves are reliable in corrosive chemical environments and excel in low- to medium-flow applications.

  • Cynergy® Valves
    Whether your applications involve ultrapure water, water for injection, corrosive chemistries or biotechniques, Cynergy® valves have a beadless weld connection or an industry standard clamp interface for adaptability to existing equipment and compliance with cGMP standards.

  • EP PFA Valves
    We offer a comprehensive line of reliable high-flow, manual and pneumatic valves that meet your needs for large volume chemical delivery. These valves provide chemical resistance in corrosive applications throughout semiconductor, LCD, TFT and flat panel display markets.

  • Manifolds and Assemblies
    Whether a subassembly or an entire system, Entegris can fabricate your unique product utilizing plastic machining, welding, bonding and/or general fabrication. Our experience in fluid handling and with PFA will result in a strong, durable, chemically-resistant solution that meets your needs.

  • SG Series Valves
    Ideal where space is limited, our Galtek® SG Series valves set the standard for small valves with all-PFA wetted surfaces used in CMP and high purity semiconductor fluid handling applications. These 1/4" orifice valves are available in 2-way and 3-way, manual and pneumatic configurations.

  • Solenoid Valves
    All wetted parts in our powerful, compact 1/4" solenoid valves are designed for high-purity and corrosive applications. To meet all of your fluid control needs, our solenoid valve is available in 2-way and 3-way configurations in 12 and 24 VDC, and 100, 115 and 230 VAC.

  • Stack Valves
    This innovatively designed 3-way valve has the ports located on one plane so they may be easily stacked side by side, significantly reducing footprint in your fluid handling system. All wetted surfaces are PFA and PTFE providing chemical resistance suitable for use with high purity chemicals and DI water.

  • Plug Valves
    Our Magnaflo® plug valve can be used in the same applications as traditional ball valves. This unique valve couples corrosion resistance and a straight-through flow path, offering a high flow, durable solution to aggressive chemical. Unlike metal vaves, the Magnaflo valve's all polymer exterior is also corrosion resistant.

  • Needle/Metering Valves
    Accuflo™ metering and needle valves are all PFA/PTFE construction, offering unrivaled durability in your corrosive environments. Configured as a manual panel-mount valve, Accuflo valves provide enhanced control of sophisticated chemicals in semiconductor and other markets requiring adjusted flow.

  • Stopcock Valves
    We offer reliable stopcock valves for any instrumentation need. 1/8" orifice valves are available in 2-way, 2-way 90° and 3-way configurations. Various port options are available to meet your fluid handling system needs.

  • Check Valves
    Corrosion-resistant Galtek® check valves reduce contamination potential in your high-purity chemical applications and provide clean delivery of sophisticated chemicals. An o-ring-free design provides a simple, clean, compact valve with a high flow rate and increased reliability. We offer a full range of 1/4", 1/2", 3/4" and 1" orifice check valves with a variety of industry standard end connections including Flaretek® and PureBond®.

  • Valve Accessories
    Learn about the numerous accessories available that help you secure and maintain Entegris valves used in ultrapure, corrosive fluid applications. Accessories include mounting bases, repair kits, tool kits and safety lock out devices.