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Siargo Mass Flow Controller

The mass flow controllers are tailored to meet most applications, except for ultra-high-purity requirements. The series opts for the fastest response and control times, the smallest footprints, better medium compatibility, and much-improved linearity and accuracy with gas conversion. They offer most of the bus interfaces and allow customization. For OEM and high-volume applications, the products are cost-effective while meeting the industrial performance standards.

Mass Flow Controller series
MFC1100 series gas mass flow controllers are designed for high-volume gas flow control applications, featuring a full-scale range of 20 to 50 Ln/min. Both analog (0~5 Vdc or 4~20 mA) and an RS485 Modbus interface for mass flow control with the proportional valve. The MFC1100 can be applied for non-corrosive process gas control with a 100:1 dynamic range. It controls within a pressure range of 0.1 to 0.8 MPa (15 to 117 PSI) and a compensated temperature range of 0 to 55 °C. Typical applications are digital anesthesia gas and welding gas delivery.
MFC1600 features proprietary Thermal-D sensing technologies for gas flow control. While the performance meets industrial standards, the configuration and material selection offer a cost-effective or OEM solution wherever required.
MFC1700 features proprietary Thermal-D sensing technologies for gas flow control. This series is an alternative to the MFC1600 series by adding on-board rotary DIP switches for offline communication baud rate and address setup. It also features an offset (zero) calibration port and hardware-based valve-override control and device status indication via LEDs on the controller’s top panel.
MFC2000 is designed for general-purpose, non-corrosive gas-flow control applications, with full-scale mass flow rates from 50 sccm to 200 SLPM. It features high accuracy and fast control time. Analog and RS485 Modbus interfaces are both offered. Other interfaces can also be requested.
MFC2600 is designed for general-purpose, non-corrosive gas-flow control applications, with full-scale mass flow rates from 50 sccm to 20 SLPM. It features high accuracy and fast control time with a down-port configuration for manifold installation. Both analog and RS485 Modbus interfaces are offered. Other interfaces can also be requested.
MFC2100 is designed for general-purpose, non-corrosive gas-flow control applications, with full-scale mass flow rates from 50 sccm to 200 SLPM. It features high accuracy and fast control time with IP65 protection. Analog and RS485 Modbus interfaces are both offered. Other interfaces can also be requested.
MFC4000 is designed for instrumentation such as GC mass spectrometers, air samplers, leakage detectors, and other applications. It has the smallest footprint of any gas mass flow controller on the market, with fast control time and customizable interfaces/connectors.
MFC5100M is designed for stand-alone applications, such as laboratory or online gas process control without a remote interface or program. The touch screen offers easy access to control parameters and allows selection of multiple gases. A plug-in power option is also offered for easy use.
MFC5000 is designed for industrial process control, offering precision, fast control times, and a variety of bus interfaces to choose from. It offers standard address and communication parameters dials for offline settings. The mechanical connections can also be fully customized.
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