Siargo Mass Flow Sensor

Siargo offers a variety of mass flow sensors with different packages, flow ranges, and interfaces for medical, instrumentation, automation, HVAC, process control, food & beverage, and many other applications. Integrated sensors with pressure, temperature, humidity, and chemical concentrations provide the turn-key solutions. Customer-specified OEM/ODM products are also available upon request.

	FS1015E series mass flow sensors are designed for medical equipment gas-flow monitoring and control applications with Siargo’s proprietary MEMS Thermal-D sensing chip. The sensors directly measure mass flow with minimal pressure loss. They can be readily applied to ventilators, endoscopes, and anesthesia equipment. FS1015E can measure a flow up to 150 SLPM. The ISO 15 mm medical connection is designed for seamless plug-and-play compatibility with medical equipment.
	FS1100 series mass flow sensors are manufactured with Siargo’s proprietary MEMS Thermal-D sensing chip, which captures thermal transfer data of the flow medium in both the space and time domains. Compared to conventional calorimetric sensing, it offers significantly better linearity across the full dynamic range, eliminates gas sensitivity for gases with similar thermal diffusivities, and enhances measurement accuracy when used with a gas conversion factor. It simultaneously outputs instantaneous flow-medium temperature data and improves the thermal sensing approach's temperature performance.
	MF3000 is designed for general-purpose mass flow metering with an optional manual control valve. The built-in flow-switch output makes it ready for pneumatic process control. The product, equipped with patented flow conditioners and accessories, allows for flexible connection without straight piping.
	FS4001E series mass flow sensors are designed for instrumentation and process gas flow control, utilizing Siargo's proprietary MEMS mass flow sensors and smart electronic circuitry. The sensors directly measure mass flow in the sub-liter-per-minute range with high accuracy and a fast response time. The current models can also be configured with a small LCD. FS4001E can measure a full-scale flow rate from 30 sccm to 1000 sccm. The barbed connector is easily connected to a soft tube.
	FS4308 series mass flow sensors are designed for general-purpose, precise gas metering, processing, monitoring, and/or control. The products are the third generation in the series, offering enhanced flow conditioning for greater installation flexibility, including manifold options. FS4308 also has a smaller footprint than its previous design. It has been applied to medical equipment, pneumatic control, process automation, and other industrial applications. The series offers a wide dynamic flow range, with a working pressure rating of up to 0.8 MPa (10 bar or 117 psi), and a compensated temperature range of -10 to +55°C.
	FS5001E series mass flow sensors are designed for general-purpose flow metering and control applications, featuring manifold mounting and utilizing Siargo's proprietary MEMS Thermal-D sensing technology. The current models can be readily applied to analytical instruments, such as gas chromatography, air samplers, and many other process control applications. FS5001E has two models: one for sub-liter-per-minute flow and another for up to 15 SLPM flow. It can also be used for measuring bypass flow.
	FS6122 series mass flow sensors provide a unique solution for multi-parameter flow measurement, featuring mass flow, gauge pressure, temperature, and humidity. It is designed for medical respiratory equipment and can also be applied to general-purpose flow metering and control applications. The sensors were designed to have very low-pressure loss. The current models can be readily applied to ventilators, respiratory analyzers, CPAP devices, and other medical devices, as well as environmental monitoring and various process control applications. FS6122 can measure uni- or bidirectional flow up to 250 SLPM, gas temperature, and gauge pressure up to ±100 cmH2O. The connectors can be fully customized.
	FS7002 series mass flow sensors are designed for general-purpose flow metering and control applications, utilizing Siargo's proprietary MEMS mass flow sensing technology and smart electronic circuitry. The sensors directly measure mass flow with a miniaturized package. The current models can be readily applied to monitoring vent passages, fans or motors, open-space airflow, and clogs. It is also an enabler for applications involving oxygen delivery and other gas delivery in limited spaces. The FS7002 has two models: the FS7002, the nonlinear version with analog output, and the FS7002L, the linearized version with I2C output. FS7002 can measure flow speeds up to 15 m/s.
	FS8000 series mass flow sensors are designed for general-purpose flow metering and control applications, utilizing Siargo's proprietary MEMS mass flow sensing technology and innovative electronic circuitry. The sensors directly measure mass flow with a very fast response time. The current models can be readily applied to high-throughput automation equipment, such as semiconductor die attachment, as well as to other applications, including air samplers, leakage detection, and air sprayers. The FS8000 primarily offers mass flow rate measurements at full scale from 30 to 500 sccm, with a dynamic range of 100:1 for the FS8001E and up to 6 SLPM for the FS8003E.