Entegris Specialty Gas Mixtures

Gas blends in a single package reduce the need to co-flow species from multiple cylinders

As experts in applied process gas, Entegris are always working to increase your efficiency, safety and performance in gas applications. Creating gas blends in customized proportions is yet another way Entegris can support your needs.

• Enriched 72GeF4 + H2 Mixture
  Enriched 72GeF4 + H2 Mixture is one of the premium gas blends Entegris offers in a single package, reducing the need to co-flow species from multiple cylinders.


• Enriched BF3 + H2 Mixture
  Entegris offers gas blends in a single package to reduce the need to co-flow species from multiple cylinders. These precision mixtures provide increased efficiency and user flexibility at the tool.


• CO Tri Mixture
  Entegris offers premium gas blends in a single package reducing the need to co-flow species from multiple cylinders.