Entegris Gas Diffusers

Rapid venting to atmosphere without adding particles to the chamber

Entegris gas diffusers are compatible with most system designs for easy installation or retrofit into load lock chambers, cooling chambers, transfer chambers and process chambers.

  • Chambergard™ Gas Diffusers
    Chambergard™ fast vent diffusers provide rapid venting to atmosphere without disturbing or adding particles to wafers in the chamber, increasing system throughput by minimizing load lock vent cycle times. They combine the flow characteristics of a diffuser with a high-efficiency filter to increase efficiency and throughput.