英特格 特種氣體混合物

成為製程氣體的專家的Entegris，使用單一包裝的混合氣體減少了從多個鋼瓶中同時流出，並一直致力於提高氣體應用的效率，安全性和性能。 以定制比例創作氣體混合物是英特格(Entegris)能夠支持您的需求的另一種方式。

• Enriched 72GeF4 + H2 Mixture
  Enriched 72GeF4 + H2 Mixture is one of the premium gas blends Entegris offers in a single package, reducing the need to co-flow species from multiple cylinders.


• Enriched BF3 + H2 Mixture
  Entegris offers gas blends in a single package to reduce the need to co-flow species from multiple cylinders. These precision mixtures provide increased efficiency and user flexibility at the tool.


• CO Tri Mixture
  Entegris offers premium gas blends in a single package reducing the need to co-flow species from multiple cylinders.