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GT 密封系统

密封系统

幾十年來，我們一直是提供Chemraz®全氟彈性體（FFKM）基本密封組件的值得信賴的供應商。 作為潔淨室製造的先驅，我們不斷地開發，具有更高的抗等離子性和減少顆粒化的新式彈性體化合物，進而提高生產率和清潔度為目標。 此外，Extensis®成型能力使得能夠研發客製化的大型密封件，用於FPD（平板顯示器）生產線中。 隨著半導體行業的不斷發展，我們的密封解決方案將與時俱進，並確保下一代技術得以實現。
設計
  • Dovetail® Seals
  • Extensis® Custom, Large-Scale Seals
  • KF Fitting Seals
  • Metal Spring Energized (MSE®)
    • 材質
  • Chemraz (全氟橡膠FFKM)
    513: Universal Compound
    520: Withstands High Loads
    543: Universal Compound
    547: Exceptional Fluorine Plasma Resistance
    550: Carbon-Loaded Compound
    551: Chemical Resistance at High Temperatures
    570: Very Low Contaminants
    571: Durable in Wet Applications
    592: High Strength & Purity
    629: Resists Aggressive Plasmas
    639: Enhanced Plasma Resistance
    640: Excellent Fluorine & Oxygen Resistance
    653: High Temperature, Carbon-Loaded Compound
    655: High Temperature, White Compound
    656: Low Metallic Ion Content
    657: Minimal Particulation in Dry Etch
    E38: Minimal Contamination in Dry Plasma
    SubFab
    XCD: Superior Thermal Resistance
    XPE-HP: Provides Superior O2, Ozone, and UV
    XPE: O2 Plasma Resistance
    XRZ: Corrosion Resistance
    XTR: Exceptional Performance in ClF3 Environments

  • Viton O型環
    FKM 706: High Purity Fluoroelastomer
    FKM 742: High-Performance Fluoroelastomer

  • FPD製程中污染最小
    FPD Blue™ 707: Minimal Contamination in FPD Processing
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