英特格 化學品輸送系統

對於最先進的製程和具有挑戰性的化學品來說，英特格(Entegris)提供安全所需的容器，蒸發器和設備，並有效地將化學物質儲存和輸送至製程室。

• Solid Chemical Delivery Systems
  Solid chemical delivery systems providing a stable mass flux and a wide variety of solid materials used in current and future technology nodes.


• Liquid Chemical Delivery Systems
  We provide containers, vaporizers and equipment necessary to safety and effectively store and deliver chemistries to the process chamber for the most advanced processes and challenging chemistries.