Entegris Liquid Filters

Contamination control technologies for chemicals, water, solvents and photochemicals

Controlling contaminants in process streams is a vital way to improve operating efficiency and enable technology advances. Entegris offers a variety of membrane and media to match the chemical compatibility and process conditions of each manufacturing environment.

• FlowPlane™ Linear Filtration Technology
  Best-in-class linear filtration technology.


• Torrento® X Filter
  Best-in-class filtration of aqueous, outgassing, and aggressive acid and base chemistries.


• Torrento® S Filter
  Best-in-class, leading-edge filtration of solvents and BEOL chemistries.


• QuickChange® NX Filter
  Advanced filtration of aqueous, outgassing, and aggressive acid and base chemistries.


• Fluorogard® NX Filter
  Clean, cost-effective filtration of non-outgassing, aqueous, acid and base chemistries or advanced solvent applications.


• Guardian™ ECD Filter
  Advanced, ultra-clean filtration of low-temperature, dilute acids and bases.


• Intercept® HP/HS Filters
  Best in class, low-temperature dilute acid filter.


• Impact® 8G Filter
  Best-in-class, ultra-clean, point-of-use photochemical filter, delivering superior flow rate performance and reduced microbubble formation capabilities.


• Microgard™ UC Filter
  Best-in-class, ultra-clean, bulk photochemical filter.


• Eximor® SV5 Filter
  Advanced clean, point-of-use filter designed for NTD and RRC solvents.