Sealing systems

For decades, we have been a trusted provider of essential sealing components with Chemraz® perfluoroelastomers (FFKM). A pioneer of cleanroom manufacturing, we continue to develop new elastomeric compounds with increased plasma resistance and reduced particulation for enhanced productivity and cleanliness. In addition, Extensis® molding capability has enabled the development of custom, large-scale seals for use in FPD (flat panel display) production. As the semiconductor industry continues to evolve, our sealing solutions will keep pace, ensuring your next generation technology is realized.

Designs

  • Dovetail® Seals
  • Extensis® Custom, Large-Scale Seals
  • KF Fitting Seals
  • Metal Spring Energized (MSE®)
  • Materials

  • Chemraz
    513: Universal Compound
    520: Withstands High Loads
    543: Universal Compound
    547: Exceptional Fluorine Plasma Resistance
    550: Carbon-Loaded Compound
    551: Chemical Resistance at High Temperatures
    570: Very Low Contaminants
    571: Durable in Wet Applications
    592: High Strength & Purity
    629: Resists Aggressive Plasmas
    639: Enhanced Plasma Resistance
    640: Excellent Fluorine & Oxygen Resistance
    653: High Temperature, Carbon-Loaded Compound
    655: High Temperature, White Compound
    656: Low Metallic Ion Content
    657: Minimal Particulation in Dry Etch
    E38: Minimal Contamination in Dry Plasma
    SubFab
    XCD: Superior Thermal Resistance
    XPE-HP: Provides Superior O2, Ozone, and UV
    XPE: O2 Plasma Resistance
    XRZ: Corrosion Resistance
    XTR: Exceptional Performance in ClF3 Environments

  • Viton Oring
    FKM 706: High Purity Fluoroelastomer
    FKM 742: High-Performance Fluoroelastomer

  • Minimal Contamination in FPD Processing
    FPD Blue™ 707: Minimal Contamination in FPD Processing
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